Sr. Process Engineer, Lithography, Terafab

We are buildingTerafab, a vertically integrated semiconductor factoryatan unprecedented scale. The facility houses logic, memory, packaging, test, and lithography mask production under one roof,optimizedfor rapid iteration andmaximumcompute density per square foot.

Process engineering is whereTerafabtechnology gets built, atom by atom, and lithography will define the limit of what we can build. You will develop and own patterning processes across three distinct chip families: edge-inference processors, space-hardened chips for orbital satellites, and high-bandwidth memory. With mask production in-house,you'llhave unprecedented feedback loops to co-optimizereticle and scanner strategies.

You should have deepexpertisein opticallithography, butbe ready to work across core process domains such as etch, metrology, and film deposition as integration evolves. This is a highly hands-on roleatone of the most ambitiousfabprograms in the world.

• Develop and qualify EUV andArFiresist processes, exposure parameters, and coat/develop optimization for critical layers

• Qualify scanners (EUV and DUV) from installation through production readiness, including dose-focus matrices, CDU, and overlay

• Own in-house mask shop process development (resist, etch, inspection, repair) and co-optimizereticle-scanner strategies using tight feedback loops

• Establish overlay and registration control strategies, scanner-to-scanner matching, and APC loop integration

• Analyze processes from a first-principles, physics-based approach to understand and manipulate mechanisms, not just recipes

• Lead root cause analysis,establishinline metrology and SPC control strategies, and drive systematic yield improvement

• Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues

• Drive next-generation lithography materials and process development

• Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or related technical field, or equivalent experience

• 5+ years of hands-on lithography process engineering experience in a semiconductorfab, especiallyadvancedlogic, memory, or foundry environment

• Deep experience with scanner qualification, resist process development, and process of record (POR) establishment at advanced nodes

• Proficiencywith lithography metrology tools,overlay metrology, defect inspection, and resist profile characterization

• StrongDesign of Experimentsskills and statistical analysis capability

• Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams

Along with competitive pay, as a full-time Tesla employee, you are eligible for the following benefits at day 1 of hire:

• Medical plans > plan options with $0 payroll deduction
• Family-building, fertility, adoption and surrogacy benefits
• Dental (including orthodontic coverage) and vision plans, both have options with a $0 paycheck contribution
• Company Paid (Health Savings Accounts) HSA Contribution when enrolled in the High-Deductible medical plan with HSA
• Healthcare and Dependent Care Flexible Spending Accounts (FSA)
• 401(k) with employer match, Employee Stock Purchase Plans, and other financial benefits
• Company paid Basic Life, AD&D
• Short-term and long-term disability insurance (90 day waiting period)
• Employee Assistance Program
• Sick and Vacation time (Flex time for salary positions, Accrued hours for Hourly positions), and Paid Holidays
• Back-up childcare and parenting support resources
• Voluntary benefits to include: critical illness, hospital indemnity, accident insurance, theft & legal services, and pet insurance
• Weight Loss and Tobacco Cessation Programs
• Tesla Babies program
• Commuter benefits
• Employee discounts and perks program